Helium implanted gallium nitride evidence of gas-filled rod-shaped cavity formation along the c-axis

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Helium implanted gallium nitride evidence of gas-filled rod-shaped cavity formation along the c-axis

formation along the c-axis Jean-François Barbot, Frédéric Pailloux, Marie-Laure David, Laurent Pizzagalli, Erwan Oliviero, and Guillaume Lucas Laboratoire de Physique des Matériaux, UMR 6630 CNRS, Université de Poitiers, SP2MI, Téléport 2, Bd M. & P.Curie, BP30179, 86962 Futuroscope-Chasseneuil Cedex, France Centre de Spectrométrie Nucléaire et de Spectrométrie de Masse, Bât. 108, 91405 Orsay C...

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ژورنال

عنوان ژورنال: Journal of Applied Physics

سال: 2008

ISSN: 0021-8979,1089-7550

DOI: 10.1063/1.2970062